Continuum modelling of an asymmetric CCRF argon plasma reactor: influence of higher excited states and sensitivity to model parameters
Mark Baldry 1,2*, Laura Libnan Haidar 1, Behnam Akhavan 1,2,3, Marcela M.M. Bilek 1,2,3,4
1 School of Physics, University of Sydney, Sydney, New South Wales 2006, Australia
2 School of Biomedical Engineering, University of Sydney, Sydney, NSW 2006, Australia
3 The University of Sydney Nano Institute, The University of Sydney, Sydney, NSW 2006, Australia
4 Charles Perkins Centre, The University of Sydney, Sydney, New South Wales 2006, Australia